Laser focus drilling technology was developed to aid chipmakers in patterning deep contact and via structures with thick resists where high depth of focus is required. Cymer’s focus drilling solution is supported by a technique involving operation of the light source at multiple bandwidths utilizing metrology that was designed to measure high-bandwidth spectra. Additionally, the unique spectral shape of Cymer’s light sources can improve depth of focus with minimal impact on other key process parameters.
Light sources equipped with focus drilling are being qualified, and are currently under chipmaker evaluation.
Erin Coller [email protected]
San Diego, Calif. www.cymer.com
Cymer and all other Cymer product or service names used herein are either registered trademarks or trademarks of Cymer, Inc. Any other marks mentioned herein are the property of their respective holders.
Forward Looking Statements
the United States
SOURCE Cymer, Inc.