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KLA-Tencor Launches Candela® 8620 Inspection System for High Brightness LED Manufacturing

MILPITAS, Calif. Jan. 20, 2011 KLA-Tencor Corporation

With its proprietary optical design and detection technology, the Candela 8620 detects and classifies sub-micron defects that are not consistently identified by current inspection methods—thereby enabling for the first time a production line monitor for these yield-limiting defects. According to industry sources, as HBLED manufacturers transition production to larger wafer sizes and introduce new patterned sapphire substrate (PSS) processes, the economic impact of resulting process-induced defects is estimated at millions of dollars in lost product revenue per year, and MOCVD epi process issues may result in as much as 40 percent of overall defect-induced yield loss.

Iain Black

Defects from substrate and epi processes impact device performance, yield and field reliability.  The Candela 8620 can detect:

  • Substrate defects such as micro-scratches and micro-cracks which can create epi process defects and directly impact LED yield and reliability
  • Defect sources from lithography and etch processes for patterned sapphire such as missing bumps and resist voids, resulting in epi defects or reduced lumen output
  • Macro- and micro- defects in MOCVD processes, including hexagonal pits and bumps leading to electrical failure, and epi cracks which can adversely impact field reliability

LED substrate and epitaxy layers pose significant inspection challenges due to high levels of background signal and nuisance defects. The Candela 8620’s imaging and detection system is optimized to enhance the signal from relevant defects-of-interest while suppressing background noise. Aided by its multi-channel detection optics, the system additionally allows high purity classification of such defects, thereby allowing comprehensive statistical process control of critical MOCVD processes.

Jeff Donnelly


About KLA-Tencor: Milpitas, Calif.

Forward Looking Statements:

Statements in this press release other than historical facts, such as statements regarding the Candela 8620’s expected performance, future developments and trends in the solid state lighting and high brightness light emitting diode industries (and the anticipated challenges and costs associated with them), the percentage of overall defect-induced yield loss that is estimated to result from MOCVD epi process issues, expected uses of the Candela 8620 by KLA-Tencor’s customers and the anticipated cost, operational and other benefits realizable by users of the Candela 8620, are forward-looking statements, and are subject to the Safe Harbor provisions created by the Private Securities Litigation Reform Act of 1995. These forward-looking statements are based on current information and expectations, and involve a number of risks and uncertainties. Actual results may differ materially from those projected in such statements due to various factors, including delays in the adoption of new technologies (whether due to cost or performance issues or otherwise), the introduction of competing products or alternative technologies by other companies, and unanticipated technological challenges or limitations that affect the implementation, performance or use of KLA-Tencor’s products.

SOURCE KLA-Tencor Corporation

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