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MEMS Equipment Sales Are Strong at Akrion Systems

ALLENTOWN, Pa. July 6, 2011 $20

Centre Quebec, Canada Europe Southeast Asia

Akrion Systems has demonstrated wet process expertise by developing innovative equipment and methods for controlled and uniform silicon etching, enhanced particle removal, and for the processing and drying of wafers with high aspect ratio features.  Among the company’s innovations are i-Clean™ in situ processing, patented ICE-1™ chemical concentration control and the patented DIO3™ ozonated-water cleaning method which replaces sulfuric acid for organic removal applications.  Versatile GAMA batch-immersion systems utilizing these inventions can be found in the fabs of many of the leading MEMS manufacturers worldwide.  

Michael Ioannou

About Akrion Systems

Allentown, Pennsylvania

SOURCE Akrion Systems

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